nanoMIPOS 4000 pages

microscope objective / lens positioning system

nanoMIPOS 400

400μm focusing range and sub-nm step width
max. lens diameter 39mm
temperature compensated
shortest settling times due to high stiffness
universal use by thread adapter
optional integrated capacitive feedback sensor
applicable for standard and inverse microscopy

applications:
surface scanning and analysis
AFM microscopy
biotechnology (e.g. cell scanning)
beam focusing for printing processes
semiconductor test equipment
fig.: nanoMIPOS 400 CAP

Concept
The nanoMIPOS 400 offers a nano
positioning and scanning range up
to 400µm in open loop operation
as well as 320µm in closed loop.
The system can be assembled with
objectives of up to 39mm
diameter.
The sophisticated monolithic
guidance design consisting of solid
flexure
hinges
means
the
trajectory is free of mechanical
play and friction – a feature of all
piezosystem jena stages. The
advanced nanoMIPOS 400 design
is FEA optimized to show an
outstanding minimum of lateral
and rotational components as well
as excellent guidance accuracy
while offering robustness against
off center and lateral loads.
To avoid drift and hysteresis, the
nanoMIPOS 400 can be equipped
with a capacitive measurement
system. In combination with the
piezosystem jena controller the
system offers in closed loop
operation high stability, linearity,
repeatability and accuracy.

Specials
The nanoMIPOS 400 design is
temperature
compensated,
while
changing
the
environmental temperature the
stage keeps its position.
Because of the bidirectional gear
design, guidance and preload are
separated. With this nanoX
design the system offers equal
and highest set and reset forces.
This is essential for nanoscan
applications that require short
settling times and minimized
overshooting.
The nanoMIPOS 400 is suited for
upside down use in inverted
microscopes.
Parfocal tube extensions for
each threading type are available
as an accessory.
Vacuum,
cryogenic
or
nonmagnetic
versions
are
available on demand.

Mounting/Installation

1. Screw the objective into the
MIPOS

2. Screw the Flex-Adapter into the
microscope

3. Clamp the MIPOS on the FlexAdapter using the attachment screw

Spacer rings to compensate the
extended optical path are available
and flex adapters for all common

threads.
phone: +49 (3641) 66880 • fax: +49 (3641) 668866 • info@piezojena.com • http://www.piezojena.com
nanoMipos_ds_Rev03_2011_10_20.doc