Auto SE, Simple Thin Film Measurement Tool0 pages

Auto Soft
The fully automatic mode provides
a very intuitive software based
on the use of icons. Four main
interfaces are available to build
experimental recipes, manage
data, control the system in realtime, and for maintenance.

Standard Configuration

Fully Automatic Mode
for Routine Analysis
1> Load Sample
• Automatic adjustment of the sample

Worldwide Customer Support

2> Run Measurement

Founded nearly 190 years ago, HORIBA Jobin Yvon is one of world’s largest manufacturers of analytical and spectroscopic systems and components. Certified ISO
9001 and 14001, our instruments are manufactured under a strict quality assurance
program. They are supported by a worldwide network of strategically located facilities in the United States, Europe and Asia that are ready to provide assistance when
and where it is needed.
Our staff of highly trained service and application specialists install and certify instrument performance, and conduct technical and application user training for smooth
and efficient commissioning of the instruments.
This commitment to product excellence and continued support is part of the
HORIBA Jobin Yvon culture.

• elect your experimental recipe
S
in the ready to use application database

Auto SE Awards

• isualization of the spot on the sample
V
with the MyAutoView vision system
• Choose your measurement site

DeltaPsi2 Scientific Mode
to Extend the Measurement
Capability

DeltaPsi2 is a fully integrated
spectroscopic ellipsometry
platform that includes advanced
measurement and analysis
capabilities and a complete
materials database.
This software is ideal for
engineering applications for new
sample characterization or
optimization of an existing
experimental recipe. Once the
new recipe is validated it can be
performed repeatedly without
expert intervention.

• easure at a single position or
M
multiple positions to map thin
film uniformity

• lear table provides thickness,
C
optical constants, film uniformity
and other material properties
of the sample
• hin film result status:
T
in or out tolerance limits
• Automatic reporting

Options
Accessoriest
t
Microspott
Tablet

•S
ample cells: Temperature controlled cell,
Electrochemical cell, Liquid cell
• ample stage: Autosampler, 360° Rotation
S
control, Transmission mount, Plastic film
mounts, Lens and curved sample mounts
Xenon lamp needed for spot sizes < 100 x 100 µm
Dimension (wxdxh): 1400-1840 x 530 x 740 mm

Performance
Measurement timet
Accuracyt
t
Repeatabilityt

• Push the Run button

3> Accurate Results

Light sourcet
Combination halogen and blue LED
Spectral ranget
440 – 1000 nm
Spot size t
500 µm x 500 µm; 250 µm x 500 µm;
t
250 µm x 250 µm; 70 µm x 250 µm;
100 µm x 100 µm; 50 µm x 60 µm; 25 µm x 60 µm
t
Detectort
CCD – Resolution: 2 nm
Sample staget
200 mm x 200 mm, automatic XYZ adjustment,
vacuum chuck, Z height 40 mm
Sample viewingt
CCD camera – Field of view: 1.33*1 mm
Resolution: 10 µm
Goniometert
Fixed at 70° - Possible set up at 66° or 61.5°

< 1 s, typical 5 s
N
IST 1000 Å SiO2 /Si: d ± 4 Å - n(632.8 nm) ± 0.002
Fused silica: n ± 0.004
± 0.2 Å – Tested on NIST 150 Å SiO2 /Si

Facility Requirements

2008 IC Industry
New System Award

2008 ACCSI Best New
Instrument of the Year

Find us at www.horiba.com/scientific or contact us:
France :t
t
USA :t
t
Japan :t
t
Germany :t
China :t

HORIBA Jobin Yvon S.A.S., Z.I. La Vigne aux Loups, 5 avenue Arago, 91380 Chilly-Mazarin
Tel: +33 (0)1 64 54 13 00 - Fax: +33 (0)1 69 74 88 61 - Email: info-sci.fr@horiba.com
HORIBA Jobin Yvon Inc., 3880 Park Avenue, Edison, NJ 08820-3012. Toll-free: +1-866-jobinyvon
Tel: +1 732 494 8660 - Fax: +1 732 549 5125 - Email: info-sci.us@horiba.com
HORIBA Ltd., Scientific Instruments Sales Dept., Alte Building Higashi-Kanda, 1-7-8 Higashi-Kanda,
Chiyoda-ku, 101-0031 Tokyo - Tel: +81 (0)3 3861 8231 - Fax: +81 (0)3 3861 8259 - Email: info-sci.jp@horiba.com
+49 (0)89 46 23 170t
Italy: +39 02 57 60 30 50t
UK: +44 (0)20 8204 8142
+86 (0)10 8567 9966t
Other countries: +33 (0)1 64 54 13 00t
Korea: +82 (0)2 753 7911

Operating systemst
Windows® 2000 / XP / Vista / 7
Power supplyt
100 V / 115 V / 230 V; 200 W; 50 / 60 Hz
Weightt
80 kg
CertificatetCE

592 mm

572 mm
760 mm

• Reprocessing capability

www.horiba.com/scientific

Technology: Spectroscopic Ellipsometer, liquid crystal modulation based

This document is not contractually binding under any circumstances - Printed in France - ©HORIBA Jobin Yvon - RCS EVRY B 837 150 366 - July 2010.

"User Oriented Software Platform"

Auto SE

Auto SE Specifications

The simple solution
to measure thin films

Film thickness,
Optical constants,
and Imaging