HIGH VACUUM FURNACES0 pages

B

HIGH VACUUM FURNACES
advancing
materials science

Specifications

Description
A monochamber high vacuum furnace can be used for
baking elements and components in HV conditions.
Double chamber walls, channelling and baffles provide
the most effective method of water cooling. The system
comprises: water cooled, stainless steel vacuum chamber with doors equipped with viton® gasket and internal Cu lining with corresponding substrate shelves.

- 1 x DN 100CF - for turbo-molecular pump
- 1 x DN 40CF - for vacuum sensor
- 1 x DN 40CF - spare
- 1 x DN 16CF - for thermocouple feedthrough
Heating in the furnace is controlled by a dedicated device Bakeout Control Unit BCU13.

Application

Periodic baking of vacuum components in order to maximize the quality of any given chamber vacuum.
Baking of chamber attachments is required to prevent the formation of cold spots to which particles and
elements would migrate and become plated out. Baking requires that all materials used inside the vacuum chamber, and not recessed in ports, shall be able
to withstand baking temperatures up to 450°C. This
requirement does not apply if it can be demonstrated
that the maximum temperature to which these materials are exposed during baking will be less than 450°C.
All hardware attached to or located directly inside the
first flange of the vacuum chamber should be capable of being baked to 250°C. Any hardware attached
directly to the chamber, out to the first isolation valve
(if used), should also be equipped with provisions for
baking. These provisions include thermal insulation and
possibly heating elements to ensure that temperatures
in the range 200-250°C (150-200°C at viton® seals) can
be achieved during bakeout. All devices and metallic
tubing attached to, and capable of being opened to the
chamber, should be reviewed to determine the need for
individual baking.

Specification
Working space

Ф213 mm L=295 mm

Ф425 mm L=322 mm

Heating

up to 600°C

up to 800°C

Vacuum

˂1x 10 mbar with adequate turbo-molecular
pumping system

˂1x 10-3 mbar

thermocouple type K

thermocouple type K

Heater voltage

230V AC

230V AC

Heater power

3,5 kW

15 kW

Weight

40 kg

500 kg

-6

Temperature measurement

Note:

All parameters of the furnace can be changed for individual customer needs.

B05.01

2437 NE Twin Knolls Drive • Suite 2 • Bend, Oregon • 97701
Phone: 541.330.0723 • Fax: 541.330.0991
Precision and Vacuum Technology
email: sales@rbdinstruments.com • web: www.rbdinstruments.com

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