Exicor® 450 AT0 pages

BIREFRINGENCE MEASUREMENT

Exicor® 450AT
PRODUCT BULLETIN

The 450AT is the ‘Heavy Lifter’ of the Exicor® birefringence
measurement system family of products. This model is
widely used in industry to measure thick lens blanks for
lithography applications as well as other large and heavy parts
(up to 450mm X 450mm and 300+mm thick). This system
is built with a robust frame and heavy duty motion control
components that are required for precision characterization in
R&D and QC lab environments. The easy access stage allows
two users to work together to load and unload samples, or for
power assist part handlers to approach the system from three
sides. The large stage size also allows for loading multiple

Features:

Heavy Duty Automated XY stage
and 3D graphical representation of birefringence
2D
parameters
side easy access stage loading design
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Large and Flexible stage platform design for adding
custom parts holders or process aids

Advanced data analysis features included standard in
user interface

parts on the stage and works in conjunction with the optional
Exicor Macro+ software to execute automated routines to
scan each part individually. The user can begin the routine
and let it run for multiple shifts, overnight or even longer
(depending on the application) without having to intervene.
With two measurement range options available to choose
from (High Sensitivity and Extended Range) the system is well
suited to address the demanding requirements of your large
samples. The optional high speed scanning package makes
high spatial resolution scans (<1mm grid spacing) practical.

Technology for Polarization Measurement

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