APIMS dQ and APIMS Quattro0 pages

Product Specifications

Thermo Scientific
APIMS δQ and APIMS Quattro

The ultra-high purity electronic gas
market relies on high gas quality
to maximize yields. The innovative,
powerful and cost-effective Thermo
Scientific APIMS gas analyzer line
ensures fast, accurate and low
detection ppt level impurity monitoring.
The unrivaled performance of the
APIMS analyzer line has established
this world renowned atmospheric
pressure ionization mass spectrometer
(API-MS) as the first choice for
continuous quality control of bulk gases.

Ultra-High Purity Electronic Gas Analyzers

Dual-Analyzer,
Single-Bay Cabinet

Gas Analysis Applications
• UHP Nitrogen
• UHP Argon
• UHP Helium
• UHP Hydrogen

The superior performance of atmospheric
pressure ionization mass spectrometers
(API-MS) combined with state-of-the-art
electronics and the most powerful process
analysis software available makes the
Thermo Scientific APIMS line the analyzer
system of choice for continuous quality
control of bulk gases in the semiconductor
and electronics industries.
API-MS offers a cost-effective alternative
to conventional quality control techniques
allowing each bulk gas to be monitored
for a range of potential contaminants, while
achieving lower detection limits (up to 100
times better) than any other technology.
The APIMS line provides a more complete
analysis of impurities including: H2, CO, CO2,
H2O, O2, CH4, Kr and Xe with other impurities
available. With the advent of 300 mm wafer
manufacturing placing even tighter impurity
controls on gas quality standards, this
technology is set to continue as the
preferred method for ppt level detection.

Features and Benefits
• Fast online measurement (typically <5 s)
enables immediate response to gas
supply upset conditions
• Fully integrated multi-analyzer analysis
provides rapid contamination detection
• Superior sensitivity with lower detection
capability of <10 ppt provides gas
analysis suitable for the most stringent
quality requirements today and in the future
• Backup capability allows each API-MS
to support multi-stream analysis during
individual API maintenance
• Industry standard communications
protocols for plant control and integration
(OPC, DDE, Modbus, Siemens 3964R,
PROFIBUS, etc.)
• Capable of accepting customer-supp