Talysurf CCI 60000 pages

Talysurf CCI 6000
The world’s highest resolution automated optical 3D profiler
PRODUCT
System stability is assured
Composite granite and welded steel
construction provide stiffness and stability
throughout the measuring loop while a
pneumatic anti-vibration system isolates
the instrument from external vibrations.
Simple set-up and operation
Measurement set-up is easy: place the
component on the positioning stage, set
the focus height and push the start button;
components need only be free of
contamination. Unusual samples can be
measured by using a combination of
stitching, auto focus, fixtures, jigs and
vacuum chucks.
Verifiable results
Artifacts traceable to international standards
are used to calibrate the instrument in both
the vertical and lateral measurement axes.
Therefore the geometrical, dimensional and
surface characteristics of any artifact can be
easily reproduced with confidence.
Data stitching
Specimen areas larger than the maximum
7mm x 7mm field of view can be measured
using the data stitching feature. The
stitching feature can also be used to take
very high resolution measurements over
areas up to the maximum size of the
automated X-Y-Z stage used.
Optical specifications
Magnification X 2.5 X 5 X 10 X 20 X 50
Numerical
aperture 0.075 0.13 0.3 0.4 0.55
Working
distance (mm) 10.3 9.3 7.4 4.7 3.4
Optical resolution (ìm)
[*surface dependent] 7.2 3.6 1.8 0.9 0.4 - 0.6*
Maximum
slope (degrees) 2.0 4.0 7.7 14.6 27.7
Measurement
area (mm) 7.0 x 7.0 3.6 x 3.6 1.8 x 1.8 0.9 x 0.9 0.36 x 0.36
Lateral sampling
resolution (ìm) 7.0 3.5 1.75 0.88 0.35
Taylor Hobson has a policy of continual improvement due to technical developments and reserves the right to deviate from catalog specifications.
Sub-angstrom resolution
Invaluable for super-polished optical
components, semiconductor, MEMS and
other applications requiring the ultimate
in high precision 3D profile analysis.
Talysurf CCI 6000 brings an unparalleled
level of performance to non-contact 3D
measurement with 0.1Å (10pm) resolution.
Scanning Broadband Interferometry
Talysurf CCI is an advanced type of
measurement interferometer. It uses a
patented correlation algorithm to find the
coherence peak and phase position of an
interference pattern produced by a
selectable bandwidth light source. This
method provides both high resolution
and excellent sensitivity to returning light.
Outstanding system performance
Excellent data resolution in X, Y and Z
axes combined with a very low missing data
rate contribute to outstanding system
performance.
• 0.1Å vertical resolution
• 0.5Å noise floor
• 0.4-0.6ìm optical resolution
• 1,048,576 data points
• 0.03Å RMS repeatability
Results in seconds
The instrument combines the surface
imaging quality of a microscope with the
high accuracy measuring capability of a
surface profiler. The result is a 3D
surface texture, step height and micro
dimensional measurement system that
gives results in seconds.
All Surface Types Can Be Measured
Talysurf CCI 6000 features ultimate
versatility. Polished, rough, specular or
scattering components having
reflectivity between 0.3% and 100% can be
analyzed. All material types including
glass, metal, photo resist, polymer, liquid
inks and pastes can be measured without
difficulty.