CT 100 Datasheet0 pages
LOGO
P RODUCT
High-resolution AND Highspeed 3D scanning system
100 MM x 100 mm scanning area
User friendly concept
Sophisticated analysis and
automation software
Coplanarity of BGA components
Roughness on solar wafer
Overview
The cyberSCAN CT 100 is a compact high resolution
non-contact profilometer. The main components of
the system are a laser or a white light sensor and a
x-, y-motion system on a granite platform. Especially
the chromatic white light sensors combine high
accuracy and high measurement speed. The
sensors are available with a resolution down to 3
nm and a measurement range up to 25 mm. The
system can scan a maximum area of 100 mm
x 100 mm. The proprietary and userfriendly
cyberTECHNOLOGIES Software offers sophisticated
surface metrology analyses and automated
measurement routines.
Software
The proprietary cyberTECHNOLOGIES, Windowsbased software package SCAN SUITE combines
system control, data collection and data analysis in
a user friendly interface. Comprehensive profile,
3D and roughness analyses conforming to DIN ISO
are included. The software can handle up to 10.000
x 10.000 data points in one scan.
An outstanding feature is the ASCAN Software:
t Automation of measurement routines
t Easy programming using tasks and templates
t Offset and fiducial correction
t Built-in SPC Charts with reporting function
t Flexible, user defined data output formats
t Barcode or user field input
t Step & Repeat function
Applications
Solid Oxid Fuel Cell (SOFC)
By courtesy of: Forschungszentrum Jülich
Typical applications are the analysis and quality
control of printing processes, such as thick-film
measurement on a variety of substrate materials,
volume measurement of paste depots, epoxy-films,
dots or other printed and dispensed features.
Geometry and position measurement of highly
contoured objects like solder bumps, microlenses, and MEMS devices, as well as flatness and
coplanarity analysis are other popular applications.
t Printed products, systems or devices
t Device packaging
t Printed circuits
t MEMS
t Fuel cell elements
t Soft and transparent materials or coatings
t Solar cells
t Medical devices
Technology
t Fast and accurate magnetic linear stage
t Measurement speed: 2 kHz (4 kHz and 14 kHz t
optional)
t 100 mm travel in x- and y-direction, lateral tt
resolution 0.05 µm
t 2D profiles and 3D topographical maps
t Large scanning area, up to the maximum travel t
of 100 mm at maximum x-, y-, z-resolution
t Laser confocal and chromatic white light sensors
t Resolution down to 3 nm, measurement range t
up to 25 mm
t Optional high resolution camera
SLOGAN
BECAUSE ACCURACY MATTERS