Panasonic PSX307 Plasma Cleaner 0 pages

"Fine Device Bonding System nn

experts in productivity

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Panasonic Factory Solutions Company of America

nnPlasma Cleaner nn Productivity rates are one-and-a-half times faster than conventional modelsՕ Main control boards are lead free nn

PSX303

MODEL NUMBERPRODUCTIVITYSUBSTRATE DIMENSIONS KXF-927D360 board per hour (when gold is etched 5 nm)50 mm x 20 mm250 mm x 70 mm0.5 mm to 2.0 mm
RF parallel electrode typeAr (option:O >
Min L x W to Max L x W SUBSTRATE THICKNESSCLEANING METHOD
GAS FOR ELECTRICAL DISCHARGEELECTRIC SOURCE PNEUMATIC SOURCE
DIMENSIONS >
2 ) * >
1 1-phase AC 200 V, 4.2 kVA0.49 MPa, 6.5 L/min (A.N.R.)1,764 mm1,045 mm
1,430 mm800 kg >
W D
H MASS >
* 1 If an optional oxygen gas is chosen as a discharging gas, an exhaust-diluting nitrogen gas is also required.note: Please refer to the detail specifications. Chip on Board PSX303 size="-5">

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