XTRAK Plasma Treatment System0 pages

XTRAKPlasma Treatment System

TM

A NORDSON COMPANY The XTRAK provides maximum performance and flexibility for
surface treatment of electronic devices. With itsinnovative
handling system, the XTRAK is ideal for applications such as
adhesion promotion and contamination removal in a highly
automated, in-line manufacturing operation or island configu-
ration. MULTIPLE PLASMA MODE CAPABILITY The system can be configured for direct, downstream and
downstream ion-free plasma.Unique to the industry, the XTRAK can be configured in thedownstream ion-free mode - removing ions, electrons andphotons, enabling the
chemically active
radicals and byproducts
to perform the work
using oxygen as thesource gas. The patent-pending XTRAK-IFPsystem is ideal forcleaning pre-programmed memory devices when UV expo-
sure may be an issue. Multiple plasma modes allow unre-
stricted choice of any process gas. SMART TUNEΙ MANAGEMENT SYSTEM The XTRAKs SMART Tune management system provides
closed-loop plasma control that optimizes the RF system and
minimizes tuning time. The system automatically recycles to a
plasma-ready state, compensating for changes in vacuum
pressure, temperature and varied lot sizes. Maximum power
to the chamber is achieved with a proprietary algorithm that
constantly measures forward and reflective power inside the
chamber. standalone configuration. It can also run in an island form-
factor to feed a designated line of equipment, including
component attach systems, wire bonders and dispense
equipment. FEATURES AND BENEFITS Fast, efficient surface treatment and cleaning prior towire bonding, die attach, encapsulation, conformal
coating, underfill and more INNOVATIVE HANDLING AND CONFIGURATION The XTRAKҒs flexible architecture accommodates a wide
variety of products, such as single strips, process carriers,
and larger, heavier components. Two-strip handling is also
available for 6-inch (length) strips or smaller. Product
handling reliability and control are ensured with a servo-
driven handling system with soft deceleration.The system operates in both automatic and manual modes,with a multi-processing feature that allows implementation of
single or multiple recipes in one operation. By integrating the
XTRAK system with loaders, the XTRAK operates in a Uniform plasma treatment across all part surfaces
with its three-axis symmetrical chamber design Proprietary software control with intuitive graphical
interface for easy touch-screen programming Ultimate application flexibility for direct, downstream
and downstream ion-free plasma treatment Full front access to all interior components allows forconvenient maintenance >