FP64 Plasma Treatment System0 pages

FP64Plasma System

A NORDSON COMPANY

Effective plasma treatment in a cost
and space efficient system.

March Plasma SystemsΒ FP64 systems are specifically
configured to meet flex panel production requirements. Daily
operating expenses, such as the process gases and power
consumption, are minimized through unique design concepts.
The FP64 system is a cost and space efficient plasma system
for innerlayer processes and flexible panel formats.The FP64 platform is completely self-contained, requiringminimal floor space. The pump, chamber, control electronics,
and 13.56 MHz power supply are housed in a single enclo-
sure. Full front access allows for convenient access to all
interior components. The pump is positioned on rollers for
easy removal. Small Footprint Horizontal Loading of Flex panels Simple, One-Button Operation Easy Programming Proven, Robust Technology Cleaning and Surface preparation >
March FP64 Plasma System The FP64 system is specifically designed to deliver superior
performance for flex panel cleaning and surface preparation
applications. The efficient use of space saving horizontal
electrodes allows for batch loads of 16 panels per cycle.
March systems are designed to maximize plasma efficiency
through the use of proprietary power matching and control
system algorithms.The FP64 systems fast cycle rates are achieved through anefficient vacuum pumping system and cool running elec-
trodes. The use of Oxygen and/or Argon process gases
makes the systems easy to install in virtually any production
location.The intuitive touch screen control panel gives continuousupdates on process status. The control system can be
password protected at multiple levels to prevent unauthorized
recipe modification. This ensures the consistent performance
of the FP64 system.The horizontal electrode shelf configuration makes loadingand unloading the FP64 system very easy.A very significant feature of the FP64 system is the very
compact and service friendly design. The system features avery small footprint and is designed for complete service
access from the front and rear of the machine only. Multiple
systems can be placed side-by-side without any floor space
penalty. Features and Benefits >
Simple operation Specific design for cleaning andsurface preparation for Flex Proprietary electrode design provides
maximum treatment performance Easy loading and unloading Compact system enclosure minimizes footprint Lower operational costs with no hazardous
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