FlexTRAK Plasma System0 pages

FlexTRAK™ Plasma System
Features and Benefits

Ultimate application flexibility for direct,
downstream and ion-free (patented)
plasma, which allows treatment without
exposure to ion and UV
Easily integrates with a variety of process
equipment, including wire bond, die
attach, dispense, mold, and marking
Slim structure that requires minimal floor
space, all service components are easily
accessible from the front
Compact, three-axis symmetrical
chamber and proprietary process control
for unmatched process uniformity
Industry leading throughput capacity with
short cycle times

Superior Plasma Process Quality and
Automation in One System
The Nordson MARCH FlexTRAK™ platform provides
unparalleled treatment uniformity and process
consistency. A three-axis symmetrical chamber ensures
all positions of the product are treated uniformly, while
tight controls over all process parameters ensure
repeatable results from product to product.

The FlexTRAK platform handles a wide variety of
product form factors, including boats, carriers,
Jedec/Auer® boats, strips, laminates, and wafers.
Depending on throughput and product form
requirements, the system can be configured for
magazine-to-magazine processing of single and multiple
strips or lead frames, wafer processing, and standalone
for island-based production environments.
SMART Tune™ Management System

High-Throughput Processing Capability
The FlexTRAK platform is a highly configurable, highthroughput plasma system. Its universal architecture
accommodates a multitude of material handling
configurations to support a wide assortment of variablesize form factors. Its small chamber volume and
proprietary process control enable unmatched short
cycle times, while its slim structure minimizes floor space
requirements.

The FlexTRAK platform’s SMART Tune management
system provides closed-loop plasma control that
optimizes the RF system and minimizes tuning time. The
system automatically recycles to a plasma-ready state,
compensating for changes in vacuum pressure,
temperature and varied lot sizes. Maximum power to the
chamber is achieved in seconds with a proprietary
algorithm that constantly measures forward and
reflective power inside the chamber.