NES2W-ih06 / i060 pages
B.—7>TyJK—/Mini Step and Repeat Exposure System
NES1W-ih06/NES1W-i06
NES2W-ih06 / NES2W-I06
LED/MEMS/Power Devicerli^tCfattfcSi'J^i^^g
Newly developed i-line optics now become available on Nikon Mini Stepper NES1
and NES2 as well as current h-line optics. These new machines are our answer to
highly emerging markets of LED/MEMS/Power Devices and IC back-end process.
NIKON ENGINEERING CO., LTD.
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