Wafer Carrier Measuring System NEXIV VMR-C45400 pages
Wafer Carrier Measurement System
Wafer Carrier Measurement System
VMR-C4540
Detects hard-to-see edges such as latch
key edges using a variety of illumination
as well as Nikon's unique image
processing technologies.
Incorporates Laser AF that provides quick
non-contact focusing, even on
transparent surfaces and on the edge of
the peripheries of the wafer, to measure
SEMI-standard dimensions with
excellent accuracy and at high speed.
Designed for 300mm, 200mm, 150mm,
125mm wafer carriers.
VMRC4540
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