Model 5910 UHP Moisture Analyzer0 pages
PROCESS INSTRUMENTS
nnnnModel 5910 UHP Moisture Analyzer
nnnnPart-per-trillion Analysis for Your UHP Gases
nnnnAMETEK Process Instruments'
nnnnModel 5910 UHP Moisture
nnnnAnalyzer achieves never-before-
nnnnseen baseline stability and
nnnnsensitivity to sub-ppbv changes
nnnnin moisture concentration while
nnnnproviding one of the fastest
nnnnresponse speeds available. The
nnnnimprovements in stability and
nnnnsensitivity are the direct result
nnnnof a design that is very carefully
nnnnengineered to provide you with
nnnnthe best protection obtainable for
nnnnyour semiconductor gas system.
nnnnMore Responsive Confirmation
nnnnof Gas Quality Without False
nnnnAlarms
nnnnHow well is your facility protected
nnnnfrom moisture contamination?
nnnnWhy do you use moisture
nnnnanalyzers in your facility? You
nnnnuse them to protect your facility
nnnnand its products from the costly
nnnnresults of contamination. To do
nnnnthis properly, it is necessary to
nnnnknow the actual ppbv moisture
nnnnconcentration in your facility
nnnnpiping—right now. Are you well-
nnnnprotected?
nnnnHow do your current moisture
nnnnanalyzers calculate their output?
nnnnHow timely is that information?
nnnnMost technologies take hours or
nnnndays to respond to changes in
nnnnppbv moisture concentration due
nnnnto their equilibrium-dependent
nnnnreadings. You'll see defective
nnnnwafers long before those
nnnnanalyzers see the actual moisture
nnnnconcentration. To try to work
nnnnaround that physical limitation,
nnnnthose analyzers often use
nnnnpredictive modeling to improve
nnnntheir apparent speed of response.
nnnnPredictive models often ignore
nnnnthe initial detection of a change
nnnnin moisture, and then, after
nnnncollecting enough data, make
nnnna prediction. Such predicting
nnnnoften results in false alarms or,
nnnnworse yet, a false low reading.
nnnnSimply put, an analyzer that has
nnnnto guess at the actual moisture
nnnnconcentration is a tremendous
nnnncompromise in quality that you
nnnncannot afford to make.
nnnnThe Quartz Crystal Sensor
nnnnThe heart of the 5910
nnnnanalyzer is a quartz-crystal
nnnnmicrobalance (QCM) sensor
nnnnand sampling system
nnnndeveloped by AMETEK
nnnnspecifically for highly accurate
nnnnmoisture measurements. The
nnnnsensor consists of a pair of
nnnnelectrodes that support the
nnnnQCM sensor. When voltage is
nnnnapplied to the sensor, a very
nnnnstable oscillation occurs.
nnnnThe faces of the oscillator are covered with a hygro-
nnnnscopic polymer. As the amount of moisture sorbed onto the
nnnnpolymer varies, the mass of the QCM changes, producing a
nnnncorresponding change in the frequency of oscillation. This
nnnnchange is directly related to the moisture concentration of the
nnnnsurrounding gas.
nnnnwww.ametekpi.com
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