Endevco® Model 40931 Micro-miniature ?Flip-Chip? MEMS Pressure Transducer Die0 pages

Model 40931
Silicon MEMS pressure sensor
Features

Description

•t Microminiature pressure die
•t 15 psia full scale range
•t Designed for surface mount installation
•t Ideal for medical OEM applications

The Endevco® brand model 40931 flip chip is a unique
silicon pressure sensor designed to address applications
where micro-miniature size is required. The unit measures
only 1.65 mm long by 1.2 mm wide by 0.4 mm tall. Four
connection pads allow for the sensor to be “flip chip”
mounted to a circuit or substrate using conductive epoxy. The
top of the sensor represents the active sensing element for
measurement of absolute pressures.
The sensor has a full scale range of 0-15 psia, and a nominal
200 mV full scale output when powered using a sensor
excitation of 5 Vdc. A uniquely sculptured diaphragm provides
high sensitivity, high overpressure capability and excellent
linearity.

3
2

4
1
+ EXC
3

- SIG

4

2

1
- EXC

+SIG