HAPR0127_Hiden Compact SIMS SNMS Surface Analyser0 pages

Mass spectrometers for vacuum, gas, plasma and surface science

Release: HAPR0127

Release date: immediate

NewProduct Information
Hiden Compact SIMS/SNMS
Surface Analyser
The Hiden Compact SIMS/SNMS tool
features full ultrahigh vacuum
compatibility to address the
requirement for fast, elemental
surface characterisation of layer
structures, contaminants and
impurities. Typical application areas
include semiconductor fabrications,
glass coatings, metallurgy,
photovoltaics, gem stone verication,
geology.

Compact SIMS

Secondary Ion Mass Spectrometry(SIMS) is a sensitive technique providing analysis
of surfaces and of surface layers at the nanometric level. The Hiden system is
designed to economically and consistently provide such analytical capability with
fast turnaround and minimum complexity, the addition of the SNMS(Sputtered
Neutral Mass Spectrometry) operating mode further enabling direct quantication
of elemental concentrations.
Samples are mounted on a rotating carousel with capacity for up to 10 samples
per analytical sequence. The IG20 gas-source ion gun is oxygen and argon
compatible with adjustable spot size down to just 50 microns to enable both
dynamic and static SIMS analyses. Control and operation are integrated with the
MAXIM 600P quadrupole detector to provide depth proling, 2D and 3D spectral
imaging and mass spectral data. The integral camera gives real-time imaging and
location of the sample, and the optional electron gun enables analysis of insulating
surfaces.
For further information on all Hiden Analytical products contact Hiden Analytical at
info@hiden.co.uk or visit the main website at: www.HidenAnalytical.com.
--- ends --Hiden Analytical Ltd. 420 Europa Boulevard Warrington WA5 7UN England
+ [0] 1925 445 225
44

+ [0] 1925 416 518
44

info@hiden.co.uk

www.HidenAnalytical.com