RGA Residual Gas Analyzers0 pages

Residual Gas Analyzers
RGA100/200/300 — 100 amu, 200 amu and 300 amu systems

SRS Residual Gas Analyzers
· 100, 200 and 300 amu systems
· Better than 1 amu resolution
· 6 decades of dynamic range
· 5 × 10−14 Torr detection limit
· RGA Windows & LabVIEW software
· Field-replaceable electron multiplier
and filament
· RS-232 and Ethernet interfaces

The 100, 200 and 300 amu residual gas analyzers from SRS
offer exceptional performance and value. These RGAs provide
detailed gas analysis of vacuum systems at about half the price
of competitive models. Each RGA system comes complete
with a quadrupole probe, electronics control unit (ECU), and
a real-time Windows ­oftware package that is used for data
s
acquisition and analysis, as well as probe control.
Rugged Probe Design
The probe consists of an ionizer, quadrupole mass filter, and a
detector. The simple design has a small number of parts which
minimizes outgassing and reduces the chances of introducing
impurities into your vacuum system. The probe assembly is
rugged and mounts onto a standard 2.75" Conflat® flange. It
is enclosed within a stainless steel tube, with the exception
of the ionizer which requires just 2.5" of clearance in your
­
vacuum system — about that of a standard ion gauge. The
probe is designed using self-aligning parts so it can easily be
reassembled after cleaning.

· RGA100 ... $3750 (U.S. list)

Compact Electronics Control Unit

· RGA200 ... $4750 (U.S. list)

The densely packed ECU contains all the necessary electronics
for controlling the RGA head. It is powered by either an
external +24 VDC (2.5 A) power supply or an optional,
built-in power module which plugs into an AC outlet. LED
indicators provide instant feedback on the status of the
electron multiplier, filament, electronics system and the

· RGA300 ... $6250 (U.S. list)

Stanford Research Systems ttphone: (408)744-9040
www.thinkSRS.com