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0.75x - 3x Zoom
NanoVue 248nm Deep UV 4X Zoom Lens
90 nm Resolution
50X Mitutoyo Objective 100X Deep UV Objective
Inspection sensitivity for 90nm
Zoom range of 75X-300X when
coupled with a 100X objective
0.15 to 0.037mm FOV with 2/3”
format sensor and a 100X objective
Uses Deep UV objectives to enble
optical inspection to under 0.1 um
Industry’s only Deep UV zoom
solution
Navitar Inc., 200 Commerce Drive, Rochester, NY 14623 585-359-4000 www.navitar.com info@navitar.com