BSMmax0 pages
gl Donaldson.
nnnnÏSM FILTRATION SOLUTIONS
nnnnBSMmax
nnnnAIRBORNE MOLECULAR
nnnnCONTAMINATION FILTERS
nnnnSemiconductor Filtration
nnnnBSMmax - THE NEXT GENERATION OF
nnnnBROAD SPECTRUM MEDIA FILTRATION
nnnnSince Donaldson first introduced broad spectrum filter
nnnnmedia for the semiconductor industry, considerable
nnnnstudies have gone into the actual levels of contaminant
nnnntypes in ambient air. Simultaneously, tool manufacturers
nnnnhave shown increasing concern about the presence
nnnnof Si-containing compounds in cleanroom air and
nnnnthe resulting irreversible damage to optical elements.
nnnnTo meet these increasingly complex and stringent
nnnndemands, Donaldson developed the BSMmax filter that
nnnnoffers the maximum protection, filter life, and flexibility
nnnnfor the broadest spectrum of contaminants that can
nnnndegrade tools and processes.
nnnnFEATURES & BENEFITS
nnnn• Removal capacity for:
nnnn• Acids (S02, HCI, HBr)
nnnn• Bases (NH3, NMP, amines)
nnnn• Condensable organics (HMDSO, TMS)
nnnn• More capacity than current carbon filters
nnnnof comparable size
nnnn• These filters are eligible for the
nnnnDonaldson Refill Program
nnnn• Global sales and service
nnnnBSMmax chemical filters are available for
nnnnLITHOGUARD®v1.0, v2.0, v3.0, and LITHOGUARD-12
nnnnchemical filtration cabinets.
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