ContourGT In Motion Optical Microscope0 pages

ContourGT InMotion 3D Optical Microscope
Enhanced Capability for Device Motion Analysis
The ContourGT InMotion 3D Optical Microscope
provides the most reliable and detailed surface
characterization of dynamic MEMS and other
micro-devices in operation. Utilizing white light
interferometry, this bench top system performs
non-contact, three-dimensional surface measurements
of MEMS features 0.1 nanometer to 10 millimeters
in height, as the devices actuate. The ContourGT
InMotion integrates Bruker proprietary stroboscopic
technology and industry-leading Vision® data acquisition
and analysis software to deliver simultaneous static
and dynamic device measurements for frequencies
from 11 hertz to 2.4 megahertz. With its combination
of flexible analyses, ease of use, and proprietary
technology advancements, the ContourGT InMotion is
the ideal solution for characterizing resonant frequency
and measuring shape distortion/deflection, surface
roughness, step heights and critical dimensions to
improve device quality control and yield.

Innovation with Integrity

The Most Complete MEMS Metrology Solution
Fast, non-contact and accurate static and dynamic 3D

characterization of micro-devices
Wide range of operation frequencies from 11Hz to

2.4MHz with complete behavioral analyses over the
full motion cycle
Frequency, amplitude and phase response

characterization
Sub nanometer vertical resolution
Accurate measurement of features from 0.1nm to

10mm in height in dynamic and static mode

Optical Microscopy