DREVA LINE0 pages
DREVA LINE
The high-vacuum deposition system has been designed as a laboratory-scale and pilot
plant for sputtering processes.
A substrate slide is positioned in or moved past up to eight work stations inside a vacuum
chamber according to a defined routine. These stations can be equipped with various tools
such as
sputter sources (DC, pulsed DC, RF)
heaters
glow-discharge or etching equipment
The substrates may be up to 2 x 2 dm2 in size.
The plant can be used to deposit metals and oxides (dielectrics).