HED series0 pages
Peltier-Type Temperature Control System for Chemicals
Fluororesin heat exchanger allows
direct temperature control for chemicals!!
Chemical Thermo-con
Temperature controller
Peltier device (Thermo-module)
Type of circulating fluid
• Deionized water
• Hydrofluoric acid
• Ammonia hydrogen
peroxide solution, etc.
THERMO-CON
AT
SEL
RET
Chemical fluid tank
or chemical bath
POWER
ON
HRZD
HRZ
Fluororesin heat exchanger
HRG
Series HED
HRS
Chemical Thermo-con
Facility water
Industry-leading withstand pressure 51 psi !!
Cooling capacity (with water):
300W, 500W, 750W
Related
Products
International standards:
SEMI Standard
S2-0706, F47-0706
Environment friendly:
HED
50° to 140°F(10° to 60°C)
Temperature stability: ±0.18°F (±0.1°C)
Operating temperature range:
HEB
(0.35MPa)
Technical
Data
With leakage detection function
HEC
Pump
HRW
OFF
RoHS
171