Model 7610 pages
Model 761
Absolute Capacitance Manometer
tt Compensated Temperature Range
Wide
Extremely Low Noise
Outstanding Long Term Stability
CE Mark Compliant
EU RoHS Compliant
Fast Response Time for Control Applications
APPLICATIONS
Solar
tSemiconductor
tt
Process Chambers
tt
Load Locks
tt
Wafer Handlers
tt Scrubbers
tPetrochemical
tPharmaceutical
t Absorption Chillers
tLasers
tAutoclaves
t Vacuum Packaging
t Freeze Drying
t Vacuum Distillation
t
DESCRIPTION
The Model 761 is Setra’s low cost absolute capacitance
manometer designed for semi-conductor, petrochemical,
pharmaceutical/process and industrial vacuum markets.
The 761’s new high frequency electronics design is fully
RoHS compliant and yields extremely low noise, while
maintaining the fast response time required for today’s
critical control applications. External noise rejection, fast
warm up, resistance to environmental effects, and quick
return to zero are unmatched by competing models
costing twice as much.
SPECIFICATIONS
Accuracy Data
Physical Description
Electrical Data
Accuracy
±0.5% of Reading
±0.25% of Reading (Optional)
Case
Powder Coated Cast
Aluminum
Excitation/Output*
13 to 30 VDC for 0-10 VDC
9 to 30 VDC for 0-5 VDC
Response Time
<20 milliseconds
Dimensions
See reverse side
Current Consumption
<10 mA
Proof Pressure
45 psia
Electrical Connection
15 Pin D-Sub
CE Compliance
2004/108/EC
Resolution
Infinite, limited only by output
noise level (≤0.005% FS)
Pressure Fittings
See Ordering Information
RoHS Compliant
EU RoHS 2011/65/EU
Long Term Stability
<±0.25% FS/YR, excluding
environmental effects
Wetted Material
Inconel®
Cavity Volume
< 5cc
1,2
Thermal Effects
Compensated Range
Environmental Data
+15 to +40°C
Pressure Media
Temperature
Gases or liquids compatible with Inconel®. Inconel® wetted
material is 0.5” tube option only. Other fitting options will
add stainless steel.
Zero Shift
<±0.02% FS/°C
Operating
+5 to +50°C
Span Shift
<±0.04% Rdg/°C
Storage
-20 to +80°C
1. Includes Non-Linearity, Non-Repeatability and Hysteresis
Shock
50 g Operating
Specifications subject to change without notice.
2. Units calibrated at nominal 20ºC
Patent Pending
761
Phone: 800-257-3872 • Fax: 978-264-0292 • www.setra.com
©2012 Setra Systems, Inc. All rights reserved. The Setra Systems name and logo are registered trademarks of Setra Systems, Inc.
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