ALS130H Mechanical-Bearing Direct-Drive Linear Stage0 pages

ALS130H Series

Linear Stages

ALS130H Series
Mechanical Bearing, Linear Motor Stage
Bi-directional repeatability to 75 nm
Direct-drive linear motor for ultra-precise
motion
High-accuracy noncontact glass scale linear
encoder
Anti-cage creep cross-roller bearings for
smooth motion
Outstanding performance in a small footprint
23 N (5.2 lb) continuous force linear servomotor
important in alignment applications where step accuracy is
critical. Furthermore, the linear motor and high resolution
encoder system also provides excellent in-position stability.
The ALS130H, with its sub-nanometer resolution, superior
bi-directional repeatability, and exceptional low-velocity
performance, is the unparalleled solution for high
performance test, measurement, inspection, and other
demanding applications.

Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the
ALS130H employs a center-driven, non-cogging linear
motor as the driving element. Since the linear motor is a
direct-drive device, there is no backlash, windup, or
"stiction" that is normally associated with a lead screw or
ball-screw drive.
The linear motor drive also offers the advantage of higher
speeds and accelerations. The compact yet powerful linear
motor drives the ALS130H to a peak unloaded acceleration
of 1 g and a maximum velocity of 300 mm/s. The result is a
high-performance stage with outstanding throughput that
significantly outperforms comparable high-accuracy screwdriven stages.

Exceptional Resolution
For alignment applications, outstanding step-to-step
resolution is critical. The ALS130H meets this demand with
a resolution of 0.5 nm when coupled with Aerotech
controls.
The direct-drive linear motor allows the ALS130H to make
precise, small resolution steps. This is particularly

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Superior Geometry
Aerotech's ultra-stiff construction and compact two-piece
design result in a stage with unmatched geometrical
tolerances. As a result, straightness and flatness for the
standard stage is <±2 µm over the entire travel.

Smooth Travel
Designed for smooth, vibration-free motion, the ALS130H
utilizes precision anti-cage creep cross-roller bearings for
outstanding smoothness of motion. Since neither the
bearing system nor the drive system utilize any
recirculating elements, the ALS130H exhibits the
outstanding ripple-free motion required for scanning and
inspection applications.

Designed for Long Life
Like all stages in the Aerotech product family, the
ALS130H was designed for outstanding long-term
performance. Both the linear motor and linear encoder are
noncontact devices - they not only exhibit long-life, but are
totally maintenance free. A moving magnet track design
eliminates the need for cable management, further
improving long-term reliability.

Precision Alignment
ALS130H series stages are easily configured as XY
assemblies. Options include precision orthogonality
alignment to 5 arc seconds and available vertical axis
solutions.

WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: sales@aerotech.com
Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: sales@aerotech.co.uk
Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: sales@aerotechgmbh.de
Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: sales@aerotechkk.co.jp
Aerotech China • Phone: +852-3793-3488 • Email: saleschina@aerotech.com

www.aerotech.com