Model 1535 Pressure Gauge for the Semiconductor0 pages

Model 1535
2-inch Stainless Steel Pressure Gauges for Semiconductor
• Helium leak tested to conrm leakage rates of less
than 10 -9 scc/sec.
• All stainless steel (Type 316L) internal surfaces for
corrosion resistance
• Large, easy-to-read dial graduations
• Handles wide variety of exotic gases
• Available with welded face seal ttings, or NPT
connection
• Assembled and packaged in Class 100 clean room
• Low mount or center back connections

Specications
• Size: 2 inch diameter
• Case: Drawn stainless steel polished with pressure
relief in back of case

Description
U.S. Gauge Model 1535 pressure gauges are designed
and manufactured for ultrahigh-purity gas distribution
equipment used in semiconductor manufacturing.
These 2 inch, all stainless steel gauges are clean room
produced, nitrogen purged, and double bagged in 3 mil
nylon bag and 6 mil poly bag.
These instruments are compatible with many toxic
and corrosive gases. Welded face seal connections
provide a threadless pressure seal and virtually eliminate
a major source of contamination. Also available in NPT
connections.
The Model 1535 is available in pressure ranges from
0 to 30 inches Hg. VAC, to 0 to 4000 psi. This precision
gauge incorporates rugged case construction with rear
pressure relief, and a seamless Bourdon tube with
welded joints for heavy-duty service.

• Ring and window: One piece, threaded
polycarbonate, or optional friction ring with
polycarbonate or glass lens
• Pointer: Aluminum, adjustable zero, black nish
• Dial: Aluminum, white background with black
markings
• Bourdon Tube: Type 316L seamless stainless steel
• Connection: Type 316L stainless steel, low mount
or center back mount, male or female face seal
tting, or 1/4 inch male NPT. Connectors are
shipped with protective plastic caps.
• Surface Finish:
Face seal connections: 10RA
1/4 in. NPT connections: 32RA
• Ranges: 30 in. Hg. vacuum to 4000 psi, single or
dual scale, see ordering information
• Overpressure: 110% of span maximum

Features
• Cleaning for UHP gas applications exceeding ANSI
B40.1 specications
• Face seal and gland connection (wetted surfaces)
are electropolished and have a less than 10 Ra
nish

• Accuracy:
±1% of span (less than 3000 psi)
±2% of span for ranges 3000 psi and above
• Scales: psi, bar, kg/cm2, KPa, MPa (single or dual
scale) in Hg. (for vacuum range, compound and
vacuum gauges only)

Tel: 215-355-6900
www.ametekpmt.com