Sputter Coater brochure0 pages

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NSC-4000 andNSC-3000 SPUTTER COATERS

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NSC-4000

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NSC-2000 (with PLC) and

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NSC-3000 (with PC)

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Description:

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The Sputter Coater NSC 4000 PC controlled stand alone system with a water cooled rotating 8" substrate platen, NSC 3000 is a

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PLC controlled table top sputtering system. The stainless steel and aluminum chambers are available. The system is pumped with a

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turbomolecular pump down to a low 10"6 torr pressure within 15-20 minutes. It can have up to three 2" or 3" planar magnetrons.

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The RF or DC power is applied to the individual magnetron through an RF switch followed with a manual RF tuner. A manual or

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stepper motor driven shutter which protects the unused magnetron during sputtering is available as an option. The magnetron and

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substrate distance is adjustable for adjustment of uniformity or deposition rate. This process is controlled through a PC and

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optional thickness monitor, makes it possible to run totally automatically. Magnetron targets are easily replaceable.

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Features:

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70 or 200 1/sec turbomolecular pump backed with a mechanical or a dry pump

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Commercial reliable 300-600 W RF and 1KW DC power supplies

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Water cooled high reliability, commercial magnetrons for multiple film sputtering

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Adjustable magnetron to platen distance to vary deposition rate versus uniformity

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Water cooled or heated, and electrically isolated platen

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Rotating platen with off axis magnetrons for better film uniformity

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Substrate RF or DC bias

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RF plasma cleaning

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Door with view port for easy wafer load and unload

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Thickness monitor

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Compact, PC controlled

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Optional load lock and surface preparation station

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Reactive Sputtering capabilities

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Other custom features such as surface temperature monitoring

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Applications:

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> Metal and dielectric coating of wafers, ceramics, glass blanks, and disk heads

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> Optical coatings, and ITO Coatings

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> Hard coatings with high temperature platens and Pulse DC power supplies

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> Reactive sputtering with RF plasma discharge

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Models:

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NSC-2000 PLC controlled table top multi-gun sputtering system

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NSC-3000 PC controlled table top multi-gun sputtering system

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NSC-4000 PC controlled, stand alone multi-gun sputtering system

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Combinatorial Side Sputtering

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System with Vertical Platen

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♦♦♦♦♦♦♦

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V»w NANO-MASTER 3019 AMn Devane Blvd. Suite 300, Austin, TX 78741;

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Tel. (512) 385-4552; Fax (512) 385-4900; http://www.nanomaster.com; main@nanomaster.com

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