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Dymatrix Falconics0 pages
Flow Controller for CMP Slurry
Fast and accurate flow control reduces waste
Ultrasonic Technology generates precision
Straight flow path prevents slurry clogging
Dymatrix™ Pinch Valve provides long life
Falconics™ Technology
Specifications
Flow Ranges
Asahi’s patented Ultrasonic Flow Meter Technology and
Dymatrix™ Pinch Valves make Falconics™ the ultimate
choice for flow control of CMP slurry. Our Ultrasonic
Technology creates a directionally concentrated and
repeatable flow signal despite bubbles and temperature
fluctuations. Asahi’s proven Dymatrix™ Pinch Valve
offers the most durable and reliable valve for aggressive
slurry. Together these features provide highly accurate
control and fast response times, which generates a
strong ROI.
50 - 500 mL/min
25 - 250 mL/min
3% S.P. (1% S.P. Typ. Act.)
Accuracy
+/- 3mL/min @ ≤ 100mL/min
1.5% S.P.
Repeatability
+/- 1.5mL/min @ ≤ 100mL/min
Response time
< 3.0 sec (1 sec Typ. Act.)
Shut off speed
< 3.0 sec
Operating Pressure
14.5 – 43.5 psi
Flush Pressure*
Medium Temp.
59 – 95 F (15 - 35 C)
End Connection
Electric Pinch Valve
80 psi
1/4” Flare or S300
Voltage
24 V DC
Current Draw
0.4 A
Output Signals
4-20mA, 0-5V, 0-10V
Signal Connection
RS 485
Purge Flow Rate
20 L/min (ANR)
Purge Connector
Ultrasonic Flowmeter
5/32” OD
US Patent #7373840
*Unit should not be operating to set point during flush mode.
Flow Characteristics
Falconics
Falconics™ responds and
Comp. B
Comp. C
160
140
Flow Out [ml/min]
stabilizes much faster
than competitive flow
controllers
No overshoot eliminates
slurry waste
Please contact us to
discuss all our exciting
performance data
Comp. A
120
100
80
60
40
20
0
0
1
2
3
4
5
Time [sec]
6
7
35 Green Street, Malden, MA 02148 • Tel: (781) 321-5409
www.asahi-america.com • asahi@asahi-america.com
Rev. 01/12
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