H1160 pages

PRECISION
IN MOTION

H116

Programmable motorised stepper stage for semi-conductor tt
microscopes

The H116 motorised stepper stage from Prior is one of a full range of motorised stepper stages from Prior, adaptable to virtually
any microscope or optical system. A range of sample holders are available and stage inserts can be customised for virtually any
application, meaning that the H116 stage combines high precision with versatility.
The H116 is especially well-suited for applications that typically involve large specimens, such as scanning semi-conductor wafers, photo masks, flat panel displays and printed circuit boards. 200 mm (8”) wafers can easily be accommodated by this sample
holder.
Prior stages are precisely engineered and ideal for a wide variety of demanding applications They are compatible both with Prior
motor controllers such as the ProScanTM III, and can easily be incorporated into OEM applications. The Prior controller can be
accessed via USB or RS-232 serial port, or with a joystick.

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H116 features
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Travel 256 x 215 mm (10” x 8.5 “)

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Optional linear scales provide precise and exact positioning,
with repeatabilities to 0.3 microns and accuracies to 1 micron

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X and Y limit switches

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2 mm pitch zero backlash recirculating ball screw

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Crossed roller ways with two high precision stepper
motors

Resolution of 0.04 of a micron

H116 Version 2

Visit Prior on the web at

prior.com