MULTISCAN Lab0 pages

MSLAB 103-V05/10.04
MULTISCAN STM The New Stage for the MULTISCAN LAB™
LAB
Increased complexity of today‘s
applications requires high-resolution
structural and chemical analysis of
nanometer-scaled structures.
The integral combination of different
analysis technologies is the key to
gain complementary information of
the very same sample area.
This goal is ideally achieved
with the new goniometermounted MULTISCAN STM,
integrated in the MULTISCAN
LAB™. To allow optimal and
simultaneous SEM and SAM
operation together with SPM
under different rotation angles,
a new scanner design was
developed. The SPM ts into the
small gap between sample and
MULTISCAN LAB™:
Complete UHV
system solution
with UHV Gemini
Column and NanoSAM.
SEM column with 8 mm working
distance. Although the scanner is ultra compact, it offers a
scan range of 6 x 6 x 1.5 µm in
XYZ, while meeting all stability criteria of a state-of-the-art
SPM. Moreover, the rigid design
also enables the use of a spring
loaded sensor exchange with a
non-magnetic tip carrier, avoiding magnetic stray elds for
unsurpassed low energy SEM performance.
This makes the new MULTISCAN STM an ideal
partner for the UHV Gemini Column. The low
beam energy performance and ultimate resolution below 3 nm offers unsurpassed SEM capabilities and makes SPM work efciently with SEM
assisted probe navigation. Chemical analysis
is pushed to previously unknown limits by the
introduction of the NanoSAM energy analyser,
enabling Scanning Auger Microscopy resolution
below the 10 nm benchmark.
The new MULTISCAN STM:
UHV-Gemini Column
NanoSAM EA
UHV-Gemini Column
NanoSAM EA
8mm
MULTISCAN STM Stage
UHV-Gemini Column
NanoSAM EA
8mm
MULTISCAN STM Stage
8mm
MULTISCAN STM Stage
Side view of the MULTISCAN STM with UHV Gemini
The goniometer-mounted MULTISCAN STM with UHV Gemini Column and
Column and NanoSAM energy analyser.
NanoSAM energy analyser.
Schematic with 25° tilted MULTISCAN STM.
Omicron NanoTechnology GmbH
www.omicron.de
25°