Model 1535 2-inch Stainless Steel Pressure Gauges for Semiconductor0 pages

EPMP - 1

Product Data
ELECTRONIC PRESSURE MEASUREMENT PRODUCTS

Model 1535 2-inch Stainless Steel
Pressure Gauges for Semiconductor
DESCRIPTION

SPECIFICATIONS

U.S. Gauge Model 1535 pressure gauges are designed
and manufactured for ultrahigh-purity gas distribution equipment used in semiconductor manufacturing.
These 2 inch, all stainless steel gauges are clean room
produced, nitrogen purged, and double bagged in 3 mil
nylon bag and 6 mil poly bag.

Size: 2 inch diameter

t These instruments are compatible with many toxic
and corrosive gases. Welded face seal connections provide a threadless pressure seal and virtually eliminate
a major source of contamination. Also available in NPT
connections.
t The Model 1535 is available in pressure ranges from
0 to 30 inches Hg VAC, to 0 to 4000 psi. This precision
gauge incorporates rugged case construction with rear
pressure relief, and a seamless Bourdon tube with welded joints for heavy-duty service.

Case: Drawn stainless steel polished with pressure relief in
back of case
Ring and Window: One piece, threaded polycarbonate, or
optional friction ring with polycarbonate or glass lens
Pointer: Aluminum, adjustable zero, black finish
Dial: Aluminum, white background with black markings
Bourdon Tube: Type 316L seamless stainless steel
Connection: Type 316L stainless steel, low mount or center
back mount, male or female face seal fitting, or 1/4 inch male
NPT – connectors are shipped with protective plastic caps
Surface Finish:
Face seal connections: 10 Ra
1/4 inch NPT connections: 32 Ra
Ranges: 30 inches Hg vacuum to 4000 psi, single or dual scale,
see ordering information
Overpressure: 110% of span maximum

FEATURES
●● Cleaning for UHP gas applications exceeding ANSI

B40.1 specifications
●● 10 Ra finish on face seal connections
●● Helium leak tested to confirm leakage rates of less

Accuracy:
±1% of span (less than 3000 psi)
±2% of span for ranges 3000 psi and above
Scales: psi, bar, kg/cm2, KPa, MPa (single or dual scale) inches
Hg (for vacuum range, compound and vacuum gauges only)

than 10-9 scc/sec.
●● All stainless steel (Type 316L) internal surfaces for

corrosion resistance
●● Large, easy-to-read dial graduations
●● Handles wide variety of exotic gases
●● Available with welded face seal fittings, or NPT

connection
●● Assembled and packaged in Class 100 clean room
●● Low mount or center back connections

Standard
polycarbonate cover

Model 1535
UHP Semiconductor Gauge
shown with
center back mount and
low mount connections

t Optional friction ring cover with
polycarbonate or glass lens

Sales/Technical Support Telephone: +1 215-355-6900 or e-mail: mctpmt.sales@ametek.com
820 Pennsylvania Boulevard | Feasterville, PA 19053 U.S.A. | Order Fax: +1 215-354-1802
© 2015, by AMETEK, Inc. All rights reserved. Printed in the U.S.A. K796435 – Effective: 6-2015, Supersedes: New (110128)
Specifications are subject to change without notice. Visit our Web site for the most up-to-date information.

www.ametekpmt.com