Dycor Mobile Cart0 pages

DYCOR

PROCESS INSTRUMENTS

Mobile Cart Gas Analysis System

A versatile gas analysis tool completely self-contained and ready for use.
Features and Benefits

Description

Applications

►tAutomated start-up of integrated
cart system.

Dycor offers a mobile cart system
that can be equipped with any type
of Dycor residual gas analyzer
(RGA). This compact, sturdy cart
can also be configured with your
choice of inlet manifolds and
vacuum pumping systems.

►tChemical vapor deposition

The cart pictured is equipped with
an enclosed ion source/inlet system,
inlet manifold heating jacket, Dycor
Dymaxion mass spectrometer, and
60 l/s compound turbomolecular
pump backed by a 1.4 CFM dry
pump.

►tt igh energy physics
H

►tChoice of analyzers/
inlet manifolds to suit your
application, e.g., atmospheric
sampling, vacuum processes.
►tAdaptable cart design
accommodates your choice of:
t - vacuum pumping systems,
t - analog/digital inputs and
outputs,
t - computer, printer and monitor.
►tSturdy aluminum frame
construction.
►tStorage space for tools, laptop
PC, user manual, etc.
►tConvenient access to RGA and
inlet manifold.

►t
Fermentation
►tSputtering
►tPlasma etching
►tMolecular beam epitaxy
►tCryogenics
►tVacuum furnaces
►tResidual gas analysis
►tEvaporation
►tIon beam milling
►tLeak detection
►tIon implantation
►tThin film production

►tQuick disconnect feature permits
easy removal of analyzer from
cart for attachment to your
vacuum chamber/process tool.

The Dycor Mobile Cart can be configured
with your choice of inlet manifolds and
vacuum pumping systems.

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