Case Study airmoTWA for air quality monitoring in clean air room0 pages

Case Study N°I1 – Industrial Applications – Air Analysis in Clean Air Room – updated: 15.09.15

Case Study
Industrial Applications

Air Analysis in Clean Air Room
Context & Challenges
To ensure people’s safety and a good repeatability of industrial process, the analysis of ambient air is crucial.
Especially, electronic boards are produced in clean air room by complex lithographic process using very reactive
chemicals. The nature and concentration of volatile compounds can be different depending on the chemical process
and can also vary rapidly. There is a need to analyze precisely and continuously gas process in air with an
instrument designed for industrial use.

Chromatotec® Solutions
Chromatotec® has developed a turnkey solution which allows the quantification and
identification of compounds at ppt, ppb, ppm and % levels. The airmoTWA is a new
industry standard for online and continuous TRAP-GC-MS-FID.
It encompasses a specific trap to concentrate the sample, a column for separation
of chemicals and two detectors: a new micro flame ionization detector (FID) and a
mass spectrometer for quantification and identification respectively.

airmoTWA in clean air room

Technical information and results
Mapping of the chemical composition of the room

airmoTWA can perform a mapping of the chemical composition of the clean air room. Thanks to the multiplexer, up
to 12 streams can be analyzed automatically. The results obtained with the GC and the mass spectrometer will be
monitored and saved. Each analysis lasts for 30 minutes. It allows the measurement of volatile compound
concentrations down to 1 ppt.
In the Figure 1, the chemical compound concentrations are displayed for the different sampling points. High
concentrations of compound 1 can be measured on different points. It shows that either filtration processes are not
efficient or instruments involved in the production process are leaking. This method is very good for the
measurement of low concentrations even after filtration. With this method, the mass spectrometer will allow you to
identify every single compound.

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