سه نظام های وکیومی
Vacuum chuck:Rugged constructionEffectiveInnovativeSureFor through machining. vacuum chuck rubber plate. Clamping slots Use : ContouringControlMillingDrillingPolishingGrindingMachining Parallelism : 0.02/100 mm Flatness : 0.02/100 mm
Options :Other dimensions
Succion along longitudinal axe
Ceramic vacuum chuck:CoorsTek's range of ceramic vacuum wafer chucks are made with pure and high quality ceramic that is corrosion resistant to harsh chemicals, and minimizes particle contamination and wafer contact. These wafer chucks have a flat design that enhances yield in semiconductor wafer applications. By reducing surface contact, the product also removes any chance of back-side contaminants disrupting the wafer's composition.